Sulphuric acid
Molar mass (M) 98,08 g/mol
Density (D) 1,84 g/cm³
Boiling point (bp) 315 °C
Melting point (mp) -15 °C
ADR 8 II
WGK 1
CAS No. [7664-93-9]
EG-Nr. 231-639-5
UN-Nr. 1830
€77.90/Pack Qty.
excl. VAT. | 2.5 l per Pack Qty.
Art. No. 9789.1

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General information
Carl ROTH's VLSI (Very Large Scale Integration) product line offers solvents and acids for cleaning and etching wafers for the semi-conductor industry. Both processes are essential for chip manufacture. Carl ROTH offers a selected range of products.
Properties:
- High purity
- Trace metal content usually below 100 ppb
- Particle-filtered, maximal 250 particles/ml
Certificates of Analysis
Guarantee analysis
Assay | 95-97 % |
Bead number (≥0,5 µm) | ≤250 p/ml |
Colour (APHA) | ≤10 |
Ammonium (NH4) | ≤0,0002 % |
Chloride (Cl) | ≤0,00001 % |
Nitrate (NO3) | ≤0,00002 % |
Phosphate (PO4) | ≤0,00005 % |
KMnO4 reducing substances | ≤0,0001 % |
Ash content (as SO4) | ≤0,0003 % |
Aluminium (Al) | ≤50 ppb |
Antimony (Sb) | ≤10 ppb |
Arsenic (As) | ≤10 ppb |
Barium (Ba) | ≤10 ppb |
Beryllium (Be) | ≤10 ppb |
Bismuth (Bi) | ≤20 ppb |
Lead (Pb) | ≤10 ppb |
Boron (B) | ≤20 ppb |
Cadmium (Cd) | ≤10 ppb |
Calcium (Ca) | ≤50 ppb |
Chromium (Cr) | ≤10 ppb |
Iron (Fe) | ≤50 ppb |
Gallium (Ga) | ≤10 ppb |
Gold (Au) | ≤10 ppb |
Potassium (K) | ≤50 ppb |
Cobalt (Co) | ≤10 ppb |
Copper (Cu) | ≤10 ppb |
Lithium (Li) | ≤10 ppb |
Magnesium (Mg) | ≤20 ppb |
Manganese (Mn) | ≤10 ppb |
Molybdenum (Mo) | ≤10 ppb |
Sodium (Na) | ≤50 ppb |
Nickel (Ni) | ≤10 ppb |
Silver (Ag) | ≤10 ppb |
Strontium (Sr) | ≤20 ppb |
Titanium (Ti) | ≤20 ppb |
Vanadium (V) | ≤10 ppb |
Zinc (Zn) | ≤20 ppb |
Tin (Sn) | ≤20 ppb |
Zirconium (Zr) | ≤10 ppb |