Technical Data Sheet
Hydrogen peroxide
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Molar mass (M) 34,02 g/mol
Density (D) 1,11 g/cm³
Boiling point (bp) 107 °C
Melting point (mp) -26 °C
ADR 5.1 II
WGK 1
CAS No. 7722-84-1
EG-Nr. 231-765-0
UN-Nr. 2014
€106.45/Pack Qty.
excl. VAT. | 2.5 l per Pack Qty.
Art. No. 9790.1
- Subtotal: 0.00
| Art. No. | Pack Qty. | Pack. | Price | Quantity | |
|---|---|---|---|---|---|
| 9790.1 | 2.5 l | plastic |
€106.45 |
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Downloads / MSDS
General information
Carl ROTH's VLSI (Very Large Scale Integration) product line offers solvents and acids for cleaning and etching wafers for the semi-conductor industry. Both processes are essential for chip manufacture. Carl ROTH offers a selected range of products.
Properties:
- High purity
- Trace metal content usually below 100 ppb
- Particle-filtered, maximal 250 particles/ml
VLSI or Very Large Scale Integration means that a large number of transistors (now several 100 million) are located on one chip. Since the gaps are very small, roughly 3 μm, the solvents and acids must be of a correspondingly high purity and be particle-filtered. For VLSI, the number of particles is limited to 250 p/ml.
For the semiconductor industry or research and development in this field, there are different degrees of purity:
VLSI
very large scale integration
Metal ion concentration per foreign element approx. 50-100 ppb, particle concentration <250/ml
ULSI
ultra large scale integration
Metal ion concentration per foreign element approx. 10-50 ppb, particle concentration <100/ml
SLSI
super large scale integration
Metal ion concentration per foreign element approx. 1-10 ppb, particle concentration <30-100/ml
Certificates of Analysis
Guarantee analysis
| Assay | 30-31 % |
| Bead number (≥0,5 µm) | ≤250 p/ml |
| Colour (APHA) | ≤10 |
| Ammonium (NH4) | ≤0,0001 % |
| Chloride (Cl) | ≤0,00005 % |
| Nitrate (NO3) | ≤0,0002 % |
| Phosphate (PO4) | ≤0,00005 % |
| Sulphate (SO4) | ≤0,0001 % |
| Ash content | ≤0,0005 % |
| Acidity (as H2SO4) | ≤0,002 |
| TOC (Total Organic Carbon) | ≤0,002 % |
| Aluminium (Al) | ≤30 ppb |
| Antimony (Sb) | ≤10 ppb |
| Arsenic (As) | ≤10 ppb |
| Barium (Ba) | ≤10 ppb |
| Beryllium (Be) | ≤10 ppb |
| Bismuth (Bi) | ≤20 ppb |
| Lead (Pb) | ≤10 ppb |
| Boron (B) | ≤20 ppb |
| Cadmium (Cd) | ≤10 ppb |
| Calcium (Ca) | ≤50 ppb |
| Chromium (Cr) | ≤10 ppb |
| Iron (Fe) | ≤30 ppb |
| Gallium (Ga) | ≤10 ppb |
| Gold (Au) | ≤20 ppb |
| Potassium (K) | ≤20 ppb |
| Cobalt (Co) | ≤10 ppb |
| Copper (Cu) | ≤10 ppb |
| Lithium (Li) | ≤10 ppb |
| Magnesium (Mg) | ≤20 ppb |
| Manganese (Mn) | ≤10 ppb |
| Molybdenum (Mo) | ≤10 ppb |
| Sodium (Na) | ≤50 ppb |
| Nickel (Ni) | ≤10 ppb |
| Silver (Ag) | ≤10 ppb |
| Strontium (Sr) | ≤10 ppb |
| Tantal (Ta) | ≤20 ppb |
| Thallium (Tl) | ≤20 ppb |
| Titanium (Ti) | ≤10 ppb |
| Vanadium (V) | ≤10 ppb |
| Zinc (Zn) | ≤20 ppb |
| Tin (Sn) | ≤20 ppb |
| Zirconium (Zr) | ≤10 ppb |