Technical Data Sheet
ortho-Phosphoric acid
Molar mass (M) 98,00 g/mol
Density (D) 1,71 g/cm³
Boiling point (bp) 158 °C
Melting point (mp) 21 °C
ADR 8 III
WGK 1
CAS No. 7664-38-2
EG-Nr. 231-633-2
UN-Nr. 1805
€181.70/Pack Qty.
excl. VAT. | 2.5 l per Pack Qty.
Art. No. 9788.1
- Subtotal: 0.00
Art. No. | Pack Qty. | Pack. | Price | Quantity | |
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9788.1 | 2.5 l | plastic |
€181.70 |
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Downloads / MSDS
General information
Carl ROTH's VLSI (Very Large Scale Integration) product line offers solvents and acids for cleaning and etching wafers for the semi-conductor industry. Both processes are essential for chip manufacture. Carl ROTH offers a selected range of products.
Properties:
- High purity
- Trace metal content usually below 100 ppb
- Particle-filtered, maximal 250 particles/ml
VLSI or Very Large Scale Integration means that a large number of transistors (now several 100 million) are located on one chip. Since the gaps are very small, roughly 3 μm, the solvents and acids must be of a correspondingly high purity and be particle-filtered. For VLSI, the number of particles is limited to 250 p/ml.
For the semiconductor industry or research and development in this field, there are different degrees of purity:
VLSI
very large scale integration
Metal ion concentration per foreign element approx. 50-100 ppb, particle concentration <250/ml
ULSI
ultra large scale integration
Metal ion concentration per foreign element approx. 10-50 ppb, particle concentration <100/ml
SLSI
super large scale integration
Metal ion concentration per foreign element approx. 1-10 ppb, particle concentration <30-100/ml
Certificates of Analysis
Guarantee analysis
Assay | 85-87 % |
Bead number (≥0,5 µm) | ≤250 p/ml |
Colour (APHA) | ≤10 |
Chloride (Cl) | ≤0,0001 % |
Fluoride (F) | ≤0,0005 % |
Nitrate (NO3) | ≤0,0001 % |
Sulphate (SO4) | ≤0,0005 % |
Insoluble matter | ≤0,001 % |
KMnO4 reducing substances | complies |
Aluminium (Al) | ≤200 ppb |
Antimony (Sb) | ≤2000 ppb |
Arsenic (As) | ≤200 ppb |
Lead (Pb) | ≤100 ppb |
Cadmium (Cd) | ≤200 ppb |
Calcium (Ca) | ≤300 ppb |
Chromium (Cr) | ≤100 ppb |
Iron (Fe) | ≤1000 ppb |
Potassium (K) | ≤200 ppb |
Cobalt (Co) | ≤300 ppb |
Copper (Cu) | ≤100 ppb |
Lithium (Li) | ≤50 ppb |
Magnesium (Mg) | ≤100 ppb |
Manganese (Mn) | ≤50 ppb |
Sodium (Na) | ≤1000 ppb |
Nickel (Ni) | ≤200 ppb |
Strontium (Sr) | ≤200 ppb |
Zinc (Zn) | ≤1000 ppb |