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ortho-Phosphoric acid

85 %, VLSI Grade
Examples of effect: Damage metals and burn body tissues; may cause serious eye damage. Safety: Avoid contact; wear safety spectacles and gloves. In the event of contact with eyes and skin, rinse with water.
i may be corrosive to metals, causes severe skin burns and eye damage
P280 P301+P330+P331 P303+P361+P353 P310
i wear protective gloves/protective clothing/eye protection/face protection, IF SWALLOWED: rinse mouth. Do NOT induce vomiting, IF ON SKIN (or hair): Take off immediately all contaminated clothing. Rinse skin with water [or shower], immediately call a POISON CENTER/doctor
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Orthophosphoric acid
Empirical formula H3PO4
Molar mass (M) 98,00 g/mol
Density (D) 1,71 g/cm³
Boiling point (bp) 158 °C
Melting point (mp) 21 °C
CAS No. [7664-38-2]
EG-Nr. 231-633-2
UN-Nr. 1805

Guarantee analysis

€150.40/Pack Qty. 

excl. VAT. | 2.5 l per Pack Qty.

Art. No. 9788.1

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General information

Products in VLSI quality

Carl ROTH's VLSI (Very Large Scale Integration) product line offers solvents and acids for cleaning and etching wafers for the semi-conductor industry. Both processes are essential for chip manufacture. Carl ROTH offers a selected range of products.


Analysis certificates

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The following analysis certificates have been found:

Guarantee analysis

Assay84-86 %  
Bead number (≥0,5 µm)≤250 p/ml  
Colour (APHA)≤10  
Chloride (Cl)≤0,0001 %  
Fluoride (F)≤0,0005 %  
Nitrate (NO3)≤0,0001 %  
Sulphate (SO4)≤0,0005 %  
Insoluble matter≤0,001 %  
KMnO4 reducing substancescomplies  
Aluminium (Al)≤200 ppb  
Antimony (Sb)≤2000 ppb  
Arsenic (As)≤200 ppb  
Lead (Pb)≤100 ppb  
Cadmium (Cd)≤200 ppb  
Calcium (Ca)≤300 ppb  
Chromium (Cr)≤100 ppb  
Iron (Fe)≤1000 ppb  
Potassium (K)≤200 ppb  
Cobalt (Co)≤300 ppb  
Copper (Cu)≤100 ppb  
Lithium (Li)≤50 ppb  
Magnesium (Mg)≤100 ppb  
Manganese (Mn)≤50 ppb  
Sodium (Na)≤1000 ppb  
Nickel (Ni)≤200 ppb  
Strontium (Sr)≤200 ppb  
Zinc (Zn)≤1000 ppb  

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