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≥99,5 %, VLSI Grade
Icon_EVE-EUD Please consider that this product might be liable to some legal sanctions as for example to obtain an end user declaration or the prohibition of some applications. For details please do contact your counterpart in our sales department!
Examples of effect: Flammable; liquids form compounds with the air which can become explosive; produce flammable gases with water or can self-combust. Safety: Keep away from open flames and sources of heat; close containers tightly; store in a fire-safe manner.
Examples of effect: Lead to damage to heath, cause irritation to eyes, skin or respiratory organs. Are fatal in larger quantities. Safety: As previously stated, in the event of skin irritation or contact with eyes, rinse with water or a suitable medium.
i highly flammable liquid and vapour, causes serious eye irritation, may cause drowsiness or dizziness
P210 P280 P304+P340 P305+P351+P338
i keep away from heat, hot surfaces, sparks, open flames and other ignition sources. No smoking, wear protective gloves/eye protection, IF INHALED: Remove person to fresh air and keep comfortable for breathing, IF IN EYES: Rinse cautiously with water for several minutes. Remove contact lenses, if present and easy to do. Continue rinsing
Pack Qty.
MEK, Methyl ethyl ketone, Ethyl methyl ketone
Empirical formula C4H8O
Molar mass (M) 72,11 g/mol
Density (D) 0,81 g/cm³
Boiling point (bp) 80 °C
Flash point (flp) -8 °C
Melting point (mp) -86 °C
CAS No. [78-93-3]
EG-Nr. 201-159-0
UN-Nr. 1193

Guarantee analysis

€101.60/Pack Qty. 

excl. VAT. | 2.5 l per Pack Qty.

Art. No. 0051.1

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from 6 Pack Qty. €96.52/Pack Qty.
from 24 Pack Qty. €91.44/Pack Qty.
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General information

Products in VLSI quality

Carl ROTH's VLSI (Very Large Scale Integration) product line offers solvents and acids for cleaning and etching wafers for the semi-conductor industry. Both processes are essential for chip manufacture. Carl ROTH offers a selected range of products.



• High purity
• Trace metal content generally between 10-50 ppb
• Particle-filtered, maximal 250 particles/ml

Analysis certificates

You can search for and download your certificate of analysis for the selected product here. Please provide your batch number.
The following analysis certificates have been found:

Guarantee analysis

Bead number (≥0,5 µm)≤250
Acidity (as CH3COOH)≤0,005
Colour (APHA)≤10
Evaporation residue≤0,0005
Chloride (Cl)≤0,0001
Sulphate (SO4)≤0,00005
Aluminium (Al)≤50
Antimony (Sb)≤10
Arsenic (As)≤10
Barium (Ba)≤20
Bismuth (Bi)≤10
Lead (Pb)≤10
Boron (B)≤20
Cadmium (Cd)≤10
Calcium (Ca)≤50
Chromium (Cr)≤10
Iron (Fe)≤50
Gallium (Ga)≤10
Potassium (K)≤20
Cobalt (Co)≤10
Copper (Cu)≤10
Lithium (Li)≤10
Magnesium (Mg)≤20
Manganese (Mn)≤10
Molybdenum (Mo)≤10
Sodium (Na)≤50
Nickel (Ni)≤10
Silver (Ag)≤10
Strontium (Sr)≤10
Titanium (Ti)≤10
Vanadium (V)≤10
Zinc (Zn)≤20
Tin (Sn)≤10
Zirconium (Zr)≤10

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