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Methanol, 5 l
Molar mass (M) 32,04 g/mol
Density (D) 0,79 g/cm³
Boiling point (bp) 65 °C
Flash point (flp) 9,7 °C
Melting point (mp) -98 °C
ADR 3 II
WGK 2
CAS No. 67-56-1
EG-Nr. 200-659-6
UN-Nr. 1230
149,45 €/VE
Excl. btw | 5 l Per VE
Bestelnr. 9785.2
- Tussentotaal: 0.00
Bestelnr. | VE | Verp. | Prijs | Hoeveelheid | |
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9785.1 | 2,5 l | plastic |
81,20 € |
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9785.2 | 5 l | plastic |
149,45 € |
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Op voorraad
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- Tussentotaal: 0.00
Downloads / MSDS
Algemene informatie
Carl ROTH's VLSI (Very Large Scale Integration) product line offers solvents and acids for cleaning and etching wafers for the semi-conductor industry. Both processes are essential for chip manufacture. Carl ROTH offers a selected range of products.
Eigenschappen:
- High purity
- Trace metal content usually below 100 ppb
- Particle-filtered, maximal 250 particles/ml
VLSI or Very Large Scale Integration means that a large number of transistors (now several 100 million) are located on one chip. Since the gaps are very small, roughly 3 μm, the solvents and acids must be of a correspondingly high purity and be particle-filtered. For VLSI, the number of particles is limited to 250 p/ml.
For the semiconductor industry or research and development in this field, there are different degrees of purity:
VLSI
very large scale integration
Metal ion concentration per foreign element approx. 50-100 ppb, particle concentration <250/ml
ULSI
ultra large scale integration
Metal ion concentration per foreign element approx. 10-50 ppb, particle concentration <100/ml
SLSI
super large scale integration
Metal ion concentration per foreign element approx. 1-10 ppb, particle concentration <30-100/ml
Analysecertificaten
Guarantee analysis
Assay | ≥99,5 % |
Bead number (≥0,5 µm) | ≤250 p/ml |
Water | ≤0,1 % |
Colour (APHA) | ≤10 |
Alkalinity | 0,5 µeq/g |
Acidity | 1 µeq/g |
Chloride (Cl) | ≤0,00005 % |
Nitrate (NO3) | ≤0,0001 % |
Sulphate (SO4) | ≤0,0001 % |
Ash content | ≤0,001 % |
Aluminium (Al) | ≤50 ppb |
Antimony (Sb) | ≤10 ppb |
Arsenic (As) | ≤10 ppb |
Barium (Ba) | ≤10 ppb |
Bismuth (Bi) | ≤10 ppb |
Lead (Pb) | ≤10 ppb |
Boron (B) | ≤10 ppb |
Cadmium (Cd) | ≤10 ppb |
Calcium (Ca) | ≤50 ppb |
Chromium (Cr) | ≤10 ppb |
Iron (Fe) | ≤50 ppb |
Gallium (Ga) | ≤10 ppb |
Gold (Au) | ≤10 ppb |
Potassium (K) | ≤50 ppb |
Cobalt (Co) | ≤10 ppb |
Copper (Cu) | ≤20 ppb |
Lithium (Li) | ≤10 ppb |
Magnesium (Mg) | ≤20 ppb |
Manganese (Mn) | ≤10 ppb |
Molybdenum (Mo) | ≤10 ppb |
Sodium (Na) | ≤100 ppb |
Nickel (Ni) | ≤10 ppb |
Silver (Ag) | ≤10 ppb |
Strontium (Sr) | ≤10 ppb |
Tantal (Ta) | ≤10 ppb |
Thallium (Tl) | ≤10 ppb |
Titanium (Ti) | ≤10 ppb |
Vanadium (V) | ≤10 ppb |
Zinc (Zn) | ≤100 ppb |
Tin (Sn) | ≤10 ppb |