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Sulphuric acid

96 %, VLSI Grade
Icon_EVE-EUD Please consider that this product might be liable to some legal sanctions as for example to obtain an end user declaration or the prohibition of some applications. For details please do contact your counterpart in our sales department!
Examples of effect: Damage metals and burn body tissues; may cause serious eye damage. Safety: Avoid contact; wear safety spectacles and gloves. In the event of contact with eyes and skin, rinse with water.
Danger
H290-H314
i may be corrosive to metals, causes severe skin burns and eye damage
P280 P301+P330+P331 P303+P361+P353 P305+P351+P338 P310
i wear protective gloves/protective clothing/eye protection/face protection, IF SWALLOWED: rinse mouth. Do NOT induce vomiting, IF ON SKIN (or hair): Take off immediately all contaminated clothing. Rinse skin with water [or shower], IF IN EYES: Rinse cautiously with water for several minutes. Remove contact lenses, if present and easy to do. Continue rinsing, immediately call a POISON CENTER/doctor
Related products
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Empirical formula H2SO4
Molar mass (M) 98,08 g/mol
Density (D) 1,84 g/cm³
Boiling point (bp) 315 °C
Melting point (mp) -15 °C
ADR 8 II
WGK 1
CAS No. [7664-93-9]
EG-Nr. 231-639-5
UN-Nr. 1830

Semiconductor grade

€85.90/Pack Qty. 

excl. VAT. | 2.5 l per Pack Qty.

Art. No. 9789.1

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Downloads / MSDS


General information

Products in VLSI quality

Carl ROTH's VLSI (Very Large Scale Integration) product line offers solvents and acids for cleaning and etching wafers for the semi-conductor industry. Both processes are essential for chip manufacture. Carl ROTH offers a selected range of products.


Solvents

Properties:

  • High purity
  • Trace metal content usually below 100 ppb
  • Particle-filtered, maximal 250 particles/ml


Certificates of Analysis

You can search for and download your certificate of analysis for the selected product here. Please provide your batch number.
The following analysis certificates have been found:

Guarantee analysis

Assay95-97 %
Bead number (≥0,5 µm)≤250 p/ml
Colour (APHA)≤10
Ammonium (NH4)≤0,0002 %
Chloride (Cl)≤0,00001 %
Nitrate (NO3)≤0,00002 %
Phosphate (PO4)≤0,00005 %
KMnO4 reducing substances≤0,0001 %
Ash content (as SO4)≤0,0003 %
Aluminium (Al)≤50 ppb
Antimony (Sb)≤10 ppb
Arsenic (As)≤10 ppb
Barium (Ba)≤10 ppb
Beryllium (Be)≤10 ppb
Bismuth (Bi)≤20 ppb
Lead (Pb)≤10 ppb
Boron (B)≤20 ppb
Cadmium (Cd)≤10 ppb
Calcium (Ca)≤50 ppb
Chromium (Cr)≤10 ppb
Iron (Fe)≤50 ppb
Gallium (Ga)≤10 ppb
Gold (Au)≤10 ppb
Potassium (K)≤50 ppb
Cobalt (Co)≤10 ppb
Copper (Cu)≤10 ppb
Lithium (Li)≤10 ppb
Magnesium (Mg)≤20 ppb
Manganese (Mn)≤10 ppb
Molybdenum (Mo)≤10 ppb
Sodium (Na)≤50 ppb
Nickel (Ni)≤10 ppb
Silver (Ag)≤10 ppb
Strontium (Sr)≤20 ppb
Titanium (Ti)≤20 ppb
Vanadium (V)≤10 ppb
Zinc (Zn)≤20 ppb
Tin (Sn)≤20 ppb
Zirconium (Zr)≤10 ppb

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