Technical Data Sheet
Acetic acid n-butyl ester
Molar mass (M) 116,16 g/mol
Density (D) 0,881 g/cm³
Boiling point (bp) 126,2 °C
Flash point (flp) 27 °C
Melting point (mp) <-90 °C
ADR 3 III
WGK 1
CAS No. 123-86-4
EG-Nr. 204-658-1
UN-Nr. 1123
€364.45/Pack Qty.
excl. VAT. | 5 l per Pack Qty.
Art. No. 20T2.1
- Subtotal: 0.00
| Art. No. | Pack Qty. | Pack. | Price | Quantity | |
|---|---|---|---|---|---|
| 20T2.1 | 5 l | plastic |
€364.45 |
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Downloads / MSDS
General information
Carl ROTH's VLSI (Very Large Scale Integration) product line offers solvents and acids for cleaning and etching wafers for the semi-conductor industry. Both processes are essential for chip manufacture. Carl ROTH offers a selected range of products.
Properties:
- High purity
- Trace metal content usually below 100 ppb
- Particle-filtered, maximal 250 particles/ml
VLSI or Very Large Scale Integration means that a large number of transistors (now several 100 million) are located on one chip. Since the gaps are very small, roughly 3 μm, the solvents and acids must be of a correspondingly high purity and be particle-filtered. For VLSI, the number of particles is limited to 250 p/ml.
For the semiconductor industry or research and development in this field, there are different degrees of purity:
VLSI
very large scale integration
Metal ion concentration per foreign element approx. 50-100 ppb, particle concentration <250/ml
ULSI
ultra large scale integration
Metal ion concentration per foreign element approx. 10-50 ppb, particle concentration <100/ml
SLSI
super large scale integration
Metal ion concentration per foreign element approx. 1-10 ppb, particle concentration <30-100/ml
Certificates of Analysis
Guarantee analysis
| Assay | ≥99 % |
| Bead number (≥0,5 µm) | ≤250 p/ml |
| Colour (APHA) | ≤10 |
| Acidity | ≤0.01 % |
| 1-Butanol | ≤0.5 % |
| n-Butyl formiate (GC) | ≤0.2 % |
| n-Butyl propionate (GC) | ≤0.2 % |
| Evaporation residue | ≤0.0005 % |
| Trace impurities | |
| Aluminium (Al) | ≤50 ppb |
| Antimony (Sb) | ≤10 ppb |
| Arsenic (As) | ≤10 ppb |
| Barium (Ba) | ≤10 ppb |
| Bismuth (Bi) | ≤10 ppb |
| Lead (Pb) | ≤10 ppb |
| Boron (B) | ≤10 ppb |
| Cadmium (Cd) | ≤10 ppb |
| Calcium (Ca) | ≤50 ppb |
| Chromium (Cr) | ≤10 ppb |
| Iron (Fe) | ≤50 ppb |
| Gallium (Ga) | ≤10 ppb |
| Gold (Au) | ≤10 ppb |
| Potassium (K) | ≤20 ppb |
| Cobalt (Co) | ≤10 ppb |
| Copper (Cu) | ≤20 ppb |
| Lithium (Li) | ≤10 ppb |
| Magnesium (Mg) | ≤20 ppb |
| Manganese (Mn) | ≤10 ppb |
| Molybdenum (Mo) | ≤10 ppb |
| Sodium (Na) | ≤100 ppb |
| Nickel (Ni) | ≤10 ppb |
| Silver (Ag) | ≤10 ppb |
| Strontium (Sr) | ≤10 ppb |
| Tantal (Ta) | ≤10 ppb |
| Thallium (Tl) | ≤10 ppb |
| Titanium (Ti) | ≤10 ppb |
| Vanadium (V) | ≤10 ppb |
| Zinc (Zn) | ≤20 ppb |
| Tin (Sn) | ≤10 ppb |